Public Announcement of the Environmental Impact Report for the Technical Transformation Project of High-Purity Sulfur Hexafluoride for Electronic Products by Nanda Optoelectronics (Zibo) Co., Ltd.
I. Project Overview
Shandong Feiyuan Technology Co., Ltd. was established in April 2015, located within the Gaoging Chemical Industrial Park recognized by the provincial government. The company's main products include electronic-grade sulfur hexafluoride, electronic-grade nitrogen trifluoride, and hydrofluoric acid. On May 5, 2019, Shandong Feiyuan Technology Co., Ltd. held an extraordinary shareholders' meeting, which reviewed and approved the "Proposal on the Continuation and Division of Shandong Feiyuan Technology Co., Ltd." All shareholders unanimously agreed to the continuation and division of Shandong Feiyuan Technology Co., Ltd. After the division, Shandong Feiyuan Technology Co., Ltd. continued to exist, and Shandong Feiyuan Gas Co., Ltd. was registered and established on July 10, 2019. After the division, Shandong Feiyuan Gas Co., Ltd. took over all businesses of Shandong Feiyuan Technology Co., Ltd. except for trade. Jiangsu Nanda Optoelectronic Materials Co., Ltd. acquired a controlling stake in Shandong Feiyuan Gas Co., Ltd. Due to development needs, Shandong Feiyuan Gas Co., Ltd. was renamed Nanda Optoelectronics (Zibo) Co., Ltd. (hereinafter referred to as "Nanda Optoelectronics") in April 2023, and the name change registration was approved by the Gaoging County Administrative Approval Service Bureau on April 24, 2023. Nanda Optoelectronics currently has two plant areas, north and south, separated by a road. The south plant area has a 30-ton/year hexafluorobutadiene and ancillary facilities project, while other projects are located in the north plant area. The north plant area of Nanda Optoelectronics currently has a 3000t/a sulfur hexafluoride facility, including two electrolysis workshops and one post-processing unit. The 1# sulfur hexafluoride electrolysis workshop is a 2000t/a sulfur hexafluoride facility, and the 2# sulfur hexafluoride electrolysis workshop is a 1000t/a sulfur hexafluoride facility; both electrolysis workshops share a set of sulfur hexafluoride post-processing units. The 1# sulfur hexafluoride electrolysis workshop was put into operation in 2015, and the 2# sulfur hexafluoride electrolysis workshop was put into operation in 2021. To improve the production efficiency of the 1# sulfur hexafluoride electrolysis workshop and reduce production costs, the electrolytic cells need to be updated. Nanda Optoelectronics (Zibo) Co., Ltd. plans to invest 13 million yuan to carry out technical transformation within the existing 1# sulfur hexafluoride electrolysis workshop and the sulfur hexafluoride post-processing unit. The existing 80 electrolytic cells with 24 plates in the 1# sulfur hexafluoride electrolysis workshop will be replaced with 35-plate electrolytic cells, and 6 new 35-plate electrolytic cells will be added, increasing the electronic-grade sulfur hexafluoride electrolysis capacity by 600 tons/year. After the technical transformation, the capacity of the 1# electrolysis workshop will increase to 2600 tons/year; within the sulfur hexafluoride post-processing unit framework, 2 new distillation towers, 1 new capture condenser, 1 new alkali washing tower, and 10 high-pressure adsorption towers will be added, increasing the post-processing capacity by 1500 tons/year. After the technical transformation, the total processing capacity will increase to 4500 tons/year; the hydrofluoric acid production capacity will increase by 64 tons/year, and the total production capacity after the technical transformation will increase to 277 tons/year. One new product tank and one new filling pump will be added, with environmental protection measures, storage, and public auxiliary projects relying on existing facilities. After the technical transformation, the electrolysis capacity in the 1# sulfur hexafluoride electrolysis workshop will increase by 600t/a to 2600 tons/year, and the total sulfur hexafluoride electrolysis capacity of the plant will be 3600 tons/year.
II. Analysis and Judgment
The electronic-grade sulfur hexafluoride produced by this project belongs to special electronic gases, mainly used for cleaning and etching gases in the semiconductor industry. It is classified as "encouraged" in the "Industrial Structure Adjustment Guidance Catalog (2024 Edition)", under the category of petrochemical and chemical industry, specifically for special chemicals: low VOCs content adhesives, environmentally friendly water treatment agents, new efficient and environmentally friendly catalysts and additives, functional membrane materials, ultra-pure high-purity reagents, photoresists, electronic gases, new display and advanced packaging materials, and other electronic chemicals and key raw materials development and production, in line with national industrial policy requirements. This project has obtained the construction project filing certificate, with the project code 2301-370300-89-02-370257. The technical transformation project is located within the Gaoging Chemical Industrial Park, which is recognized by the Shandong provincial government as the third batch of chemical parks. The park's functional positioning is to strengthen the new materials industry focusing on fluorine materials, boron materials, and other new materials, to expand the fine and special chemical products mainly based on chemical synthesis raw materials and intermediates, chemical additives, etc., and to cultivate supporting chemical raw material industries. The technical transformation project belongs to fluorine materials, in line with the park's industrial development plan; the land use type for the technical transformation project is Class III industrial land, in line with the park's land use plan. According to the "Gaoging County Territorial Space Master Plan (2021-2035)", the existing plant area of Nanda Optoelectronics is located within the urban development boundary, not occupying permanent basic farmland or ecological protection red lines. This project complies with the ecological environment zoning control requirements of the Gaoging Chemical Industrial Park as stipulated in the "Notice of the Zibo Municipal Ecological Environment Committee Office on Issuing the
III. Main Environmental Issues and Environmental Impacts
1. Main Environmental Issues of Concern
According to the characteristics of the project, the main environmental issues of concern in this evaluation include:
(1) The pollution prevention measures and environmental management of the technical transformation project, focusing on whether the pollution prevention technical measures adopted by the technical transformation project can achieve the emission standards, with particular attention to the whole process prevention and control and end-of-pipe treatment of fluorides.
(2) The acceptability of atmospheric environmental impacts. The project is located in the Gaoging Chemical Industrial Park, with the nearest sensitive point being Chengjia Village (NNW, 1170m), focusing on the impact of atmospheric pollutant emissions on nearby sensitive points.
(3) The relevant pollution prevention measures for groundwater and soil.
(4) The feasibility of environmental risk prevention measures for the project.
2. Main Environmental Impacts of the Technical Transformation Project
(1) Environmental Air Impact
Electrolysis cathode exhaust is collected through closed pipelines into the tail gas treatment system, treated by the existing two-stage water washing + one-stage alkali washing, and then discharged through a 25m high exhaust stack (DA001). Non-condensable gas from the distillation tower is treated by one-stage deep cooling (liquid nitrogen -60℃) and then discharged through the existing two-stage water washing + one-stage alkali washing through a 25m high exhaust stack (DA006). Hydrogen fluoride unloading exhaust and hydrofluoric acid storage tank breathing exhaust are collected through closed pipelines into the tail gas treatment system, treated by the existing four-stage water washing + one-stage alkali washing, and then discharged through a 15m high exhaust stack (DA016).
The fluoride emission concentrations from the above exhaust stacks all meet the "Inorganic Chemical Industry Pollutant Emission Standards" (GB31572-2015) Table 4 standards (fluoride 3.0mg/m3).
The unorganized emissions from the technical transformation project mainly include fluorides from the electrolysis workshop and post-processing unit area. Through strengthened management and the use of closed material conveying methods, the fluoride concentration at the factory boundary meets the "Inorganic Chemical Industry Pollutant Emission Standards" (GB31572-2015) Table 5 standards.
The technical transformation project is located in a non-attainment area, with the exceeding factor being particulate matter, and the technical transformation project does not involve particulate matter emissions. The maximum concentration contribution rate of each pollutant under normal operating conditions of the new pollution sources added by the technical transformation project is less than 100%, and the superimposed values meet the environmental quality standards.
(2) Water Environmental Impact
The wastewater from the technical transformation project mainly includes alkali washing tower wastewater, water removal system wastewater, ground washing wastewater, domestic sewage, circulating sewage, and initial rainwater.
Water removal system wastewater is reused in the water washing tower of the sulfur hexafluoride post-processing unit, circulating sewage is treated by the supporting electrodialysis device and reused for circulating water replenishment, alkali washing tower wastewater, ground washing wastewater, domestic sewage, and initial rainwater are treated by the plant's wastewater treatment station and discharged into the Nanyue Water Co., Ltd. wastewater treatment plant, and finally discharged into the Zhimai River. The quality of the discharged wastewater meets the "Inorganic Chemical Industry Pollutant Emission Standards" (GB31573-2015) Table 1 and the regional wastewater treatment plant influent quality requirements, and is further treated by the Zibo Nanyue Water Co., Ltd. wastewater treatment plant before being discharged into the Zhimai River. The project wastewater is not directly discharged into surface water bodies, and the impact on the surrounding surface water environment is small.
All wastewater generated during normal production and in accident conditions is collected through closed pipelines; all water-related links have taken effective anti-seepage measures. Under the condition of strict implementation of anti-seepage measures, the risk of this project's impact on the groundwater environment is small. Considering the regional hydrogeological conditions, groundwater protection targets, and other factors, the construction of this project has a small impact on the groundwater environment, and with the establishment of a comprehensive groundwater monitoring system, the risk of groundwater pollution from the operation of this project is controllable.
(3) Noise Environmental Impact
The main noise sources of the project are pumps and other equipment. After taking noise reduction measures and distance attenuation, the factory boundary noise meets the "Industrial Enterprises Noise Emission Standards at Boundary" (GB12348-2008) Class 3 area standards (daytime 65 dB(A), nighttime 55 dB(A)).
(4) Solid Waste Environmental Impact
The solid waste of the project mainly includes waste carbon plates, waste electrolytes, waste adsorbents, waste packaging, waste lubricants, sludge, crystalline salts, and domestic waste. Domestic waste is cleared by the sanitation department, waste carbon plates and sludge are comprehensively utilized, and others are hazardous waste, entrusted to qualified units for disposal. All types of solid waste are properly treated.
(5) Soil
The current soil environmental quality in the project plant area and surrounding areas is good; under the condition of strict implementation of soil environmental protection measures, the impact of this project on the soil environment is small.
(6) Environmental Risk
After implementing the three-level prevention and control system and other risk prevention measures and emergency plan requirements, the environmental risk level of the project is acceptable, and the project risk can be effectively controlled.
(7) Protection Distance
This project does not require the setting of an atmospheric environmental protection distance.
